Overview

A Microscope that Measures Up to Individual Needs Whether samples are small or large, simple or complex, or measurements are being taken by a novice or an expert, the Olympus STM7 range features measuring microscopes tailored to fit your needs. Experience STM7

A Microscope that Measures Up to
Individual Needs

Whether samples are small or large, simple or complex, or measurements are being taken by a novice or an expert, the Olympus STM7 range features measuring microscopes tailored to fit your needs.

Experience STM7

STM7

Refined Optical Performance The STM7 series uses the same UIS2 infinity-corrected optical system found in state-of-the-art optical microscopes. As a result, observed images have high resolution and high contrast, with aberration thoroughly eliminated to help ensure highly accurate measurement in minute detail.

Refined Optical Performance

The STM7 series uses the same UIS2 infinity-corrected optical system found in state-of-the-art optical microscopes.
As a result, observed images have high resolution and high contrast, with aberration thoroughly eliminated to help ensure highly accurate measurement in minute detail.

^{STM7-LF FEM analysis}	Reliable Measurements with a Stone Stage-Mounting Plate To further improve measurement accuracy, the STM7 series uses a highly durable, vibration-resistant frame with a granite surface plate. This stability enables sub-micron level measurements with minimal error.

STM7-LF FEM analysis

^{STM7-LF FEM analysis}

Reliable Measurements with a Stone Stage-Mounting Plate

To further improve measurement accuracy, the STM7 series uses a highly durable, vibration-resistant frame with a granite surface plate. This stability enables sub-micron level measurements with minimal error.

User-Friendly, High-Precision, 3-Axis Measurement As modern manufacturing technology becomes increasingly miniaturized and precise, highly accurate measurements are even more essential—not only along the XY axis, but also along the Z-axis. Olympus responded by creating the first reflective active, confocal autofocus system.

User-Friendly, High-Precision, 3-Axis Measurement

As modern manufacturing technology becomes increasingly miniaturized and precise, highly accurate measurements are even more essential—not only along the XY axis, but also along the Z-axis. Olympus responded by creating the first reflective active, confocal autofocus system.

_{Calibration certificate issued by Olympus Corporation Test & Analysis Center, and authenticated by ILAC-MRA calibration accreditation agencies (JCSS, JAB).} _{Traceability systems vary depending on periods and countries/regions. The samples used in STM7 calibrations are calibrated in each country/region. Please ask Olympus for details.}	Dependable Quality Based On a Strict Traceability System The accuracy of Olympus’ measuring microscopes is controlled by a strict traceability system, and Olympus even offers traceable calibration at the time of installation.

STM7 calibrations

_{Calibration certificate issued by Olympus Corporation Test & Analysis Center, and authenticated by ILAC-MRA calibration accreditation agencies (JCSS, JAB).}
_{Traceability systems vary depending on periods and countries/regions. The samples used in STM7 calibrations are calibrated in each country/region. Please ask Olympus for details.}

Dependable Quality Based On a Strict Traceability System

The accuracy of Olympus’ measuring microscopes is controlled by a strict traceability system, and Olympus even offers traceable calibration at the time of installation.

Suggested Models

Reliable Modular Systems

Five configurations provide you with flexibility to choose the features that you need.

Manual Models			Motorized Models

STM7-SF	STM7-MF	STM7-LF	STM7-MFA	STM7-LFA

STM7-CS100 ^{Stage: 100 mm x 100 mm}	STM7-CS200 ^{Stage: 200 mm x 200 mm}	STM7-CS300 ^{Stage: 300 mm x 300 mm}	STM7-CS200 ^{Stage: 200 mm x 200 mm}	STM7-CS300 ^{Stage: 300 mm x 300 mm}

See Specification Chart

	STM7-SF	STM7-MF	STM7-LF	STM7-MFA	STM7-LFA
Z-axis focus	Manual		Manual	Motorized
Standard	BF or BF/DF		BF or BF/DF	BF or BF/DF
Option	DIC/POL		DIC/POL	DIC/POL
_{Measurement objectives} Brightfield
_{Focus navigator} STM7-FN
_{Autofocus unit} STM7-AF	－		－
_{Measurement support software} STM7-BSW
_{Measurement support software} ^{(Multiple Image Alignment /MIA and extend Focus Image/EFI)} STM7-ASW-ME

OBSERVATION METHOD

BF: Brightfield
DF: Darkfield
DIC: Differential interference contrast
POL: Polarized light

Option : Option

Operability

Stages that Fit Your Samples

Common Problems

Short measurement stroke precludes the measurement of larger samples•Samples must be rotated because the X-axis measurement area is shorter than the Y-axis measurement area
Due to the narrow measurement range, it is impossible to line up large numbers of samples on the stage to measure them at the same time

STM7 Solutions

The STM7 features a 300 mm x 300 mm stage capable of measuring large samples, including 300 mm wafers and printed circuit boards.
The X- and Y-axis measurement areas are equally long, eliminating the need to rotate samples
Long measurement areas for both the X and Y-axis allow multiple samples to be lined up on the stage for more efficient measurement

Maximum Measurement Stroke 300 mm x 300 mm

Three stages are available, each with a different measurement stroke - 100 mm x 100 mm, 200 mm x 200 mm, and 300 mm x 300 mm. Whether your samples are large or small, we offer a stage that fits your application.

STM7-CS100

_STM7-CS100
^{100 mm x 100 mm}

STM7-CS200

_STM7-CS200
^{200 mm x 200 mm}

STM7-CS300

_STM7-CS300
^{300 mm x 300 mm}

Broad Range of Magnifications and Working Distances

Common Problems

Most conventional measuring microscopes only accept a measuring objective or metallurgical objective, limiting the observation options

STM7 Solutions

The STM7 meets the requirements of a wide variety of observations. It responds to your needs at both low and high magnifications, enables the measurement of uneven samples requiring ultra-long working distance objectives, and even offers a variety of observation methods

Measuring Objectives The objectives’ very long working distance helps you be confident when focusing on samples with large peaks and troughs and minimizes the chance that the objective comes in contact with the sample. Furthermore, their low-magnification capability enables wide areas to be observed in a single view.

Measuring Objectives

The objectives’ very long working distance helps you be confident when focusing on samples with large peaks and troughs and minimizes the chance that the objective comes in contact with the sample.

Furthermore, their low-magnification capability enables wide areas to be observed in a single view.

Measuring Objectives

Sample

^{Brightfield image}	^{Darkfield image}	Metallurgical Objectives Metallurgical objectives enable high-magnification, high resolution observation comparable to that of optical microscopes. What’s more, these objectives can be used for brightfield, darkfield, and DIC observation. Click here for details about UIS2 objective lenses

Brightfield image

^{Brightfield image}

Darkfield image

^{Darkfield image}

Metallurgical Objectives

Metallurgical objectives enable high-magnification, high resolution observation comparable to that of optical microscopes.

What’s more, these objectives can be used for brightfield, darkfield, and DIC observation.

Click here for details about UIS2 objective lenses

Revolutionary Control Unit Refines Usability

Common Problems

Additional functions require additional operational units. Operators can’t always locate the corresponding unit quickly, which significantly reduces measurement efficiency
Numerous operational units and their power supplies around the main unit occupy valuable working space

STM7 Solutions

Almost all measuring microscope operations can be efficiently completed on the nearest operational unit
The system requires only a single operational unit and power supply, regardless of how many functions are added, freeing up workspace

Controllers With the STM7 series, a single controller makes it possible to perform virtually all measuring microscope operations, including use of readout reset, illumination control, focusing, and autofocus. For efficiency and convenience, the unit can be placed wherever you wish and operated easily with one hand.	^{For Manual Z-Axis Focusing Models: STM7-HS Hand Switch}	^{For Motorized Z-Axis Focusing Models: STM7-MCZ Focus Controller}

Controllers

With the STM7 series, a single controller makes it possible to perform virtually all measuring microscope operations, including use of readout reset, illumination control, focusing, and autofocus. For efficiency and convenience, the unit can be placed wherever you wish and operated easily with one hand.

For Manual Z-Axis Focusing Models: STM7-HS Hand Switch

^{For Manual Z-Axis Focusing Models: STM7-HS Hand Switch}

For Motorized Z-Axis Focusing Models: STM7-MCZ Focus Controller

^{For Motorized Z-Axis Focusing Models: STM7-MCZ Focus Controller}

Control Box

The power supply and transmission for each unit are combined in a single control box. This maximizes the workspace even when a range of optional functions, such as the focus navigator, are added.

Manual and Motorized Focus Options

Manual and motorized focus control options are available. Choose the model that addresses your needs in terms of samples and measurement content, regardless of stage size - all frames incorporate a linear scale for the Z-axis that enables 3-axis measurement.

Manual Z-Axis Focus Models

Manual models offer excellent cost performance with familiar handle operation that enables rapid vertical movement for users who measure samples with a variety of heights.

Motorized Z-Axis Focus Models

The motorized unit improves operability and reduces handling fatigued caused by making repeated focus and height measurements. The coaxial knobs for coarse and fi ne movement offer a feeling similar to manual operation, while the models can also be equipped with an autofocus unit.

Automatic Light Intensity Adjustment
Improves Efficiency

Common Problems

Analog volume adjustment used by conventional measuring microscopes does not enable the quantitative assessment of light intensity, which can lead to variability in measured values as light intensity changes
With conventional measuring microscopes, light intensity may need to be adjusted every time the objective is switched—making for an inefficient workflow

STM7 Solutions

Observations and measurements can always be performed under the same conditions thanks to the microscope’s quantitative display of light intensity value
Illumination method and light intensity are automatically adjusted to the preset value when the objective is switched, whenever the light intensity manager is used in combination with a coded revolving nosepiece

Precisely Control Light Intensity Values with a Quantitative Digital Display

The STM7 series displays light intensity using quantitative digital display, enabling observations to be made under consistent illumination conditions.

Precisely Control Light Intensity Values with a Quantitative Digital Display

^{5X Intensity 50}	^{20X Intensity 70}	^{100X Intensity 120}	No More Manual Adjustments The light intensity manager can be used with the coded revolving nosepiece configuration. The coded revolving nosepiece automatically detects when you change objectives. This allows the illumination method and light intensity to be registered for each objective and adjusted automatically during measurements when the objective is switched. Now, there is no need to manually adjust light intensity, which used to be required with every switch between magnifications.

5X Intensity 50

^{5X Intensity 50}

20X Intensity 70

^{20X Intensity 70}

100X Intensity 120

^{100X Intensity 120}

No More Manual Adjustments

The light intensity manager can be used with the coded revolving nosepiece configuration. The coded revolving nosepiece automatically detects when you change objectives. This allows the illumination method and light intensity to be registered for each objective and adjusted automatically during measurements when the objective is switched. Now, there is no need to manually adjust light intensity, which used to be required with every switch between magnifications.

Check Measurement Results and Equipment Status Fast with a Detachable Digital Readout

Common Problems

The need to check the operation status of equipment, such as illumination, or measured values on individual units makes overall operation cumbersome

STM7 Solutions

The STM7 series displays microscope status, such as illumination, together with measured values on an indicator display area, for easy checking at a glance

Fast, Visual Status Check The indicator displays the device status and settings. The minimum X-, Y-, and Z-axis values can be switched between 0.1 μm and 1 μm, and the display units can be switched between mm, μm, inches and mil.	^{Digital readout attached to the frame}

Fast, Visual Status Check

The indicator displays the device status and settings. The minimum X-, Y-, and Z-axis values can be switched between 0.1 μm and 1 μm, and the display units can be switched between mm, μm, inches and mil.

Digital readout attached to the frame

^{Digital readout attached to the frame}

^{Digital readout placed on a desk}	Detachable Digital Readout Enables Individual Preference and Placement Whether attached to the frame or a desk, the placement of the detachable digital readout is up to the individual user. While standing to take measurements, it can be placed on the side of the frame at almost the same height as the site of observation for easy viewing. When operating from a sitting position, such as observation or measurements on a monitor using a digital camera or when using the motorized Z-axis focusing model, simply place the digital readout and hand controller on the desk.

Digital readout placed on a desk

^{Digital readout placed on a desk}

Detachable Digital Readout Enables Individual Preference and Placement

Whether attached to the frame or a desk, the placement of the detachable digital readout is up to the individual user. While standing to take measurements, it can be placed on the side of the frame at almost the same height as the site of observation for easy viewing. When operating from a sitting position, such as observation or measurements on a monitor using a digital camera or when using the motorized Z-axis focusing model, simply place the digital readout and hand controller on the desk.

Height Measurement

Faster, Simpler, More Accurate Height Measurement

Common Problems

When doing visual measurement, variations can arise in the height measurements between different operators. Furthermore, this measurement method is time-consuming and inefficient

STM7 Solutions

The STM7 focus navigation system reduces the operator subjectivity in height measurements. It also shortens the time required to perform height measurement to achieve greater efficiency

Simple, Precise Focusing System with Superior Repeatability Olympus’ focus navigator delivers highly reproducible height measurement by projecting a pattern within the field of view and identifying vertical deviations. Slight errors can occur in height measurements taken with normal visual observation, even when focus appears to be sharp. The focus navigator, however, enables measurements to be made simply by matching up the marks, reducing operator subjectivity in measurement results.

Simple, Precise Focusing System with Superior Repeatability

Olympus’ focus navigator delivers highly reproducible height measurement by projecting a pattern within the field of view and identifying vertical deviations. Slight errors can occur in height measurements taken with normal visual observation, even when focus appears to be sharp. The focus navigator, however, enables measurements to be made simply by matching up the marks, reducing operator subjectivity in measurement results.

Autofocus Advantage for Fast and Highly Accurate Height Measurement

Common Problems

During visual measurement, the results of height measurement can vary between different operators
Manual height measurement requires the operator to repeatedly move the stage and adjust the focus with the handle, making measurement time-consuming and inefficient
Focusing on minute objects, such as bonding wires, is difficult

STM7 Solutions

Using the autofocus unit, the measured value remains highly accurate regardless of the operator
In TRACK mode, the image is automatically and continually kept in focus, enabling efficient height measurement in minimal time. The same mode renders manual focusing unnecessary for XY measurements, resulting in greater efficiency
When a 100X objective is used, the laser spot diameter can be as small as 1 μm, permitting autofocus to be used locally, even on extremely minute objects

Dedicated Autofocus Unit:
Outstanding Reproducibility and Focusing Speed

The STM7 autofocus unit allows highly accurate height measurements to be made with minimal time, regardless of the level of operator experience. Use of the reflective active, confocal method provides a stable focal point independent of surface roughness or a slanting sample surface, while the small laser diameter enables the use of autofocus, even on minute objects, such as bonding wires.

One-Shot Mode

Instantaneously takes autofocus from roughly focused to sharply focused at the center of the field of view.

TRACK Mode

The TRACK Mode provides autofocus that tracks the peaks and troughs of the sample, even if the stage is moved, keeping the image continually in focus. This advancement greatly improves the efficiency of Z-axis measurements by enabling observations to be made without taking your hands off the X and Y handles.

Measurement Support System

Measure Complex-Shaped Objects Accurately, Quickly, and Simply

Measurement Support System The ability to clearly and easily see the output display component of measuring microscopes is essential. Olympus measurement software deliver complex measurements with greater accuracy. The software also enables the use of digital cameras. Learn More about Measurement Support Software

Measurement Support System

The ability to clearly and easily see the output display component of measuring microscopes is essential. Olympus measurement software deliver complex measurements with greater accuracy. The software also enables the use of digital cameras.

Learn More about Measurement Support Software

Accessories that Widen the Range of Observation and Measurement

Coded Revolving Nosepiece Combining a coded revolving nosepiece with a digital camera lets you display the objective magnification on-screen during observation and allows you to record that magnification. This convenient feature allows information on your sample and the objective’s magnification to be recorded at the same time when recording a sample.

Coded Revolving Nosepiece

Combining a coded revolving nosepiece with a digital camera lets you display the objective magnification on-screen during observation and allows you to record that magnification. This convenient feature allows information on your sample and the objective’s magnification to be recorded at the same time when recording a sample.

	STM7-FS/ Foot Switch Enables hands-free transmission of data, allowing operators to complete measurement without taking hands off the X and Y handles.

STM7-FS/ Foot Switch

Enables hands-free transmission of data, allowing operators to complete measurement without taking hands off the X and Y handles.

SZ-LW61/ White LED Illumination Unit This light-weight, space-saving design model provides a long operating life and low power consumption. The cost-effective LED illumination unit is also free from the flickering and brightness fluctuation.

SZ-LW61/ White LED Illumination Unit

This light-weight, space-saving design model provides a long operating life and low power consumption. The cost-effective LED illumination unit is also free from the flickering and brightness fluctuation.

	SZX2-ILR66+SZX-RHS/ LED Ring Illuminator + Manual Control Unit SZX-RHS manual control unit enables independent illumination of four-segments of the SZX2-ILR66 reflected LED ring illuminator, which provides clear images with high color temperature. The optimal illumination can be selected from 13 patterns.

SZX2-ILR66+SZX-RHS/ LED Ring Illuminator + Manual Control Unit

SZX-RHS manual control unit enables independent illumination of four-segments of the SZX2-ILR66 reflected LED ring illuminator, which provides clear images with high color temperature. The optimal illumination can be selected from 13 patterns.

Rotatable Stage Enables easy parallel alignment of sample.	_STM7-RS100 ^{for STM7-CS100 100 mm x 100 mm stage}	_STM7-RS200 ^{for STM7-CS200 200 mm x 200 mm stage}	_STM7-RS300 ^{for STM7-CS300 300 mm x 300 mm stage}

Rotatable Stage

Enables easy parallel alignment of sample.

STM7-RS100 for STM7-CS100

_STM7-RS100
^{for STM7-CS100

100 mm x 100 mm stage}

STM7-RS200 for STM7-CS200

_STM7-RS200
^{for STM7-CS200

200 mm x 200 mm stage}

STM7-RS300 for STM7-CS300

_STM7-RS300
^{for STM7-CS300

300 mm x 300 mm stage}

Specifications

SPECIFICATIONS OF STM7 (Manual Model)

			Manual Model
			Small stage	Midsize stage	Large stage
Microscope body			STM7-SF	STM7-MF	STM7-LF
	Focus	Vertical movement range	175 mm		145 mm
		Maximum measurable height	120 mm (with measurement objective) 175 mm (with metallurgical objective)		90 mm (with measurement objective) 145 mm (with metallurgical objective) ^*1
		Z-axis measurement resolution	0.1 um
		Z-axis drive method	Manual coaxial fine/coarse focusing knobs
	Illumination	LED illumination	White: for reflected light illumination, green: for transmitted light illumination
Observation tube			MM6-ETR Erect image trinocular tube (100:0/0:100)
Eyepiece (F.N.22)			MM6-OCC10X (with cross hairs) , MM6-OC10X
Objectives	BF (Bright field)		MM6C-KMAS Illumination
			U-5RES-ESD Nosepiece
			MPLFL5X,10X,LMPLFLN20X,50X,100X Metallurgical objectives
	BF (Brightfiels) /DF (Darkfield)		MM6C-RLAS Illumination
			U-D5BDRES-ESD Nosepiece
			LMPLFLN5XBD,10XBD,20XBD,50XBD,100XBD Metallurgical objectives
LED unit	White color (Reflected)		MM6-ILW
	Green color (Transmitted)		MM6-ILG
Stage			STM7-CS100	STM7-CS200	STM7-CS300
	Measuring range		X-axis 100 mm, Y-axis 100 mm	X-axis 200 mm, Y-axis 200 mm	X-axis 300 mm, Y-axis 300 mm
	Measurement accuracy (L: measuring length)		(3+2L/100) μm	(3+4L/200) μm	(3+6L/300) μm
	Accuracy assurance weight		6 kg	10 kg	15 kg
Counter			STM7-DI
	Number of axes		Three
	Unit		μm / mm / inch / mil
	Minimum resolution		0.1 um
	Control box		STM7-CB
	Hand switch		STM7-HS
	Focus controller		－
	Interface cable		－
Anti-vibration plates			－	STM7-VI
Power cable			UYCP
Dimensions (W x D x H) mm			466 x 583 x 651	606 x 762 x 651	804 x 1024 x 686
Weight (kg)			84 kg	152 kg	277 kg
Power consumption			100-120/220-240V - 50/60Hz 0.3A/0.2A	100-120/220-240V - 50/60Hz 0.3A/0.2A	100-120/220-240V - 50/60Hz 0.3A/0.2A

_{*1 When using the large frame STM7-LF/STM7-LFA, a specimen whose height is 100 mm or less can be placed at the position backward from the light axis by 180 mm or more.}

OBJECTIVES WORKING DISTANCE

Objective			1X	3X	5X	10X	20X	50X	100X
Measuring objectives	MM6-OB series		59.6	76.8	65.4	50.5	－	－	－
Metallurgical objectives	MPLFLN series	Brightfield	－	－	20.0	11.0	3.1	1.0	1.0
	LMPLFLN series	Long working distance	－	－	22.5	21.0	12.0	10.6	3.4
	MPLFLN-BD series	Brightfield/darkfield	－	－	12.0	6.5	3.0	1.0	1.0
	LMPLFLN-BD series	Brightfield/darkfield, long working distance	－	－	15.0	10.0	12.0	10.6	3.3

STM7-BSW SYSTEM REQUIREMENTS

Item
CPU	Intel Core i3 Processors 3 GHz or more with an STM7-CU camera, an Intel Core i5 or equivalent or higher is required with DP23/DP28 cameras
Memory	4 GB or more with an STM7-CU camera, whereas 8 GB is required and 16 GB is recommended with DP23/DP28 cameras
HD available space	100 GB or more hard disk space for installation SSD hard disk is recommended for high speed image acquisition
Graphic card	Graphic card available for resolution 1980 x 1080 and 32 bit color
Drive	DVD Drive
PC input device	2-button mouse (3-button mouse with a wheel is recommended), keyboard
Operating system	Microsoft Windows 10 Pro/Pro for Workstations (64 bit)
Web browser	Internet Explorer 11

_{* Microsoft Office 32 bit and 64 bit 2013/2016/2019/2021/365 (SAC) are also supported.}

SPECIFICATIONS OF STM7 (Motorized Model)

			Motorized Model
			Midsize stage	Large stage
Microscope body			STM7-MFA	STM7-LFA
	Focus	Vertical movement range	175 mm	145 mm
		Maximum measurable height	120 mm (with measurement objective) 175 mm (with metallurgical objective)	90 mm (with measurement objective) 145 mm (with metallurgical objective) ^*1
		Z-axis measurement resolution	0.1 um
		Z-axis drive method	Motorized FOCUS button: Coarse movement speed 8 mm/s (max.) Fine/coarse focusing knob: Fine focusing speed can be selected from 4 values (800 μm, 400 μm, 100 μm, 50 μm)
	Illumination	LED illumination	White: for reflected light illumination, green: for transmitted light illumination
Observation tube			MM6-ETR Erect image trinocular tube (100:0/0:100)
Eyepiece (F.N.22)			MM6-OCC10X (with cross hairs) , MM6-OC10X
Objectives	BF (Bright field)		MM6C-KMAS Illumination
			U-5RES-ESD Nosepiece
			MPLFL5X,10X,LMPLFLN20X,50X,100X Metallurgical objectives
	BF (Brightfield) /DF (Darkfield)		MM6C-RLAS Illumination
			U-D5BDRES-ESD Nosepiece
			LMPLFLN5XBD,10XBD,20XBD,50XBD,100XBD Metallurgical objectives
LED unit	White color (reflected)		MM6-ILW
	Green color (Transmitted)		MM6-ILG
Stage			STM7-CS200	STM7-CS300
	Measuring range		X-axis 200 mm, Y-axis 200 mm	X-axis 300 mm, Y-axis 300 mm
	Measurement accuracy (L: measuring length)		(3+4L/200) μm	(3+6L/300) μm
	Accuracy assurance weight		10 kg	15 kg
Counter			STM7-DI
	Number of axes		Three
	Unit		μm / mm / inch / mil
	Minimum resolution		0.1 um
	Control box		STM7-CBA
	Hand switch		－
	Focus controller		STM7-MCZ
	Interface cable		U-IFCBL200	U-IFCBL200
Anti-vibration plates			STM7-VI
Power cable			UYCP
Dimensions (W x D x H) mm			606 x 762 x 811	804 x 1024 x 844
Weight (kg)			159 kg	284 kg
Power consumption			00-120/220-240V 50/60Hz 0.6A/0.35A	100-120/220-240V 50/60Hz 0.6A/0.35A

_{*1 When using the large frame STM7-LF/STM7-LFA, a specimen whose height is 100 mm or less can be placed at the position backward from the light axis by 180 mm or more.}

OPTION

Objectives	Measurement objectives	MM6-OB series (1X /3X /5X /10X)
Focus navigator	Focus navigator unit	STM7-FN
Focus navigator	Green LED unit	MM6-ILG
Autofocus	Autofocus unit	STM7-AF
DIC	U-DICR DIC slider for reflected light	U-DICR
Software/Camera^*1	Measurement Support Software	STM7-BSW
Camera	Digital camera Low	STM7-CU
	Digital camera Middle	DP23-CU
	Digital camera High	DP28-CU
TV adapter	C-mount camera port tube with 0.5X lens	U-TV0.5XC-3
TV adapter	C-mount camera port tube with 0.35X lens	U-TV0.35XC-2
Rotatable stage	For 100 x 100 mm	STM7-RS100
	For 200 x 200 mm	STM7-RS200
	For 300 x 300 mm	STM7-RS300
ND filter	ND filter (Transmittance 6%)	U-25ND6
ND filter	ND filter (Transmittance 25%)	U-25ND25
DIC	DIC/Polarizer	U-PO3
DIC	DIC/Analyzer	U-AN360-3
Software	MIA, EFI optional software	STM7-ASW-ME
Foot switch		STM7-FS
Power supply unit		MM6-ILPS-2
Stage micrometer		OB-M/OB-MM