Setting the Standard in White Light Interferometry
Our white light interferometric (WLI) Mirau objective lenses deliver reliable, high-resolution data capture for precise 3D surface measurements. Designed with the needs of original equipment manufacturers (OEMs) and researchers in mind, these optics support both in-line and off-line metrology across a wide range of applications in optical profilometry.
Key Benefits of Our White Light Interferometry Objective Lenses
Wide field of view (FOV) to capture more data
High numerical aperture (NA) for detailed resolution
Factory tested to support consistent performance
Whether you work in precision engineering or manufacturing, these advantages help you maximize efficiency and accelerate results.
Comparison images of a Fresnel lens sample taken with a conventional WLI 20X objective (NA 0.4) and Evident’s 20X WLI objective (NA 0.6).
Comparison images of a Fresnel lens sample taken with a conventional WLI 50X objective (NA 0.55) and Evident’s 50X WLI objective (NA 0.8).
Precisely Measure Surfaces on Complex Samples
Precisely measuring steep slopes on smooth surfaces is a challenge for conventional, white light interferometric, and confocal optics.
With higher NAs up to 0.8, our WLI Mirau-type optics capture more light and finer details. This higher NA enables optical profilometers to perform precise 3D geometrical measurements of surface variations and minute features.
Increase Throughput in High-Precision 3D Metrology
Expand your high-precision measurement area in high resolution.
Our high NA 20X and 50X models offer up to six times and four times the field of view of conventional 50X and 100X WLI objectives, respectively, with the same surface slope measurement capability and lateral resolution. This wider view reduces the need for image stitching and speeds up vertical scanning interferometry (VSI) and step height measurements.
Left: 2×2 stitched image acquired with a conventional 50X objective (NA 0.55). Right: single image acquired with Evident’s WLI 20X objective (NA 0.6).
Evident’s WLI objective lenses (left) include fixing screws (middle) and an adjustment ring mechanism (right).
Stay Ahead of Changing Conditions in White Light Interferometry
Measurement accuracy can be affected by temperature-induced shifts in focus. Our integrated thermal compensation adjustment ring helps maintain interference fringe contrast, even with temperature fluctuations, supporting more precise, reliable, and sensitive surface measurements.
Simply adjust the ring to the position with the highest fringe contrast possible to achieve consistent measurement results with ease.
Maintain Precision Effortlessly
Work uninterrupted and frustration free—even when vibration is a factor.
Four fixing screws* lock the objective’s adjustment ring in place, so you can focus on performing precise measurements instead of frequent fine tunings.
Each screw is placed at a 90-degree interval, and any one can be used to secure the ring. Quickly tighten the outward one using a screwdriver—no need to remove adjacent objectives.
*Fixing screws are currently available on the 10X, 20X, and 50X objectives.
Consistent Optical Performance You Can Rely On
Each WLI objective lens is semi-apochromatic and includes a high-quality reference mirror for strong fringe contrast and minimal wavefront aberration. Every unit is factory-tested, with two detailed data sheets documenting reference mirror quality and wavefront performance.
Left: no fringes before adjusting for thermal changes. Middle: fringe contrast generates as the ring is adjusted. Right: highest fringe contrast after ring adjustment.
Specifications
Specifications
Objective Name
WLI10XMRTC
WLI20XMRTC
WLI50XMRTC
WLI100XMRTC
Correction
Infinity-corrected
Infinity-corrected
Infinity-corrected
Infinity-corrected
Magnification
(with a Tube Lens of 180 mm Focal Length)
10X
20X
50X
100X
Numerical Aperture (NA
0.3
0.5
0.8
0.8
Working Distance (WD) [mm]
8.2
1.0
1.0
0.7
Focal Length [mm]
18
9.0
3.6
1.8
Objective Field Number (OFN)
22
22
22
22
Immersion Medium
Air/dry
Air/dry
Air/dry
Air/dry
Spring Loaded
N/A
N/A
N/A
N/A
Termal Compensation Adjustment Ring for Interferometry Pattern