The AL120 wafer loader series provides fast, safe transfer of both silicon and compound semiconductor wafers from the cassette to the microscope stage. Designed to increase product throughput, the wafer handler combines with our MX63 semiconductor microscope for a reliable wafer inspection solution.

Precision and Flexibility

Accommodates Multiple Wafer Sizes for Wafer Handling and Inspection

The ability to accommodate different wafer sizes is a key for expanding wafer fabrication facilities. The AL120 series consists of three models based on wafer diameter, the 200 mm model, the 150 mm and 200 mm convertible model, and the 150 mm model for wafer sizes of 150 mm or less. Each system is designed for wafer transfer and microscope inspection. Topside and backside macro inspections are also available for all wafer sizes.

Wafer size and thickness

Supports Thin Wafer Handling and Inspection

To meet the demands of thin wafer manufacturers, the arm design of the AL120-LMB-90 model can handle a full cassette of 90 µm wafers.

Functional

 Enhanced Macro Inspection of Semiconductor Wafers

Macro inspection with a 360-degree rotation function (simulation)

A 360-degree self-rotating function provides a complete macro inspection of the wafer's top and back surface, enabling easy identification of defects and particles. The built-in joystick controls the tilt of the wafer during topside macro inspection. Operators can adjust the angle of the wafer to optimize inspection results.

Wafer Handling Made Easy

• To meet the demands of varying inspection routines, the AL120 wafer loader is recipe driven with 10 programmable system configurations, including specific cassette types, wafer specifications, and transfer speeds. Quick push button selection lets the operator load different products instantly.
• Wafer handler parameters and recipe settings are visible on the LCD display. Operators can confirm routines and results before and after the inspection.
• The AL120 wafer loader provides non-contact optical centering and notch/flat detection and alignment. These features reduce the contact between the wafer and equipment, improving wafer cleanliness.

Reliable

Maximizes Wafer Safety throughout the Wafer Transfer Process

The AL120 design includes advanced functions to maximize wafer safety. The 3-sensor system continuously monitors wafer positions for safe and proper wafer retrieval, transfer, loading, and unloading. These features prevent damage from loading more than one wafer into the slot and the pickup of accidental cross-slots.

Reliable Microscope Platform for Semiconductor Wafer Observation

The AL120 wafer loader interfaces with our MX™ series of dedicated wafer inspection microscopes that provide exceptional image resolution and clarity across a range of observation methods, including brightfield, darkfield, differential interference contrast (DIC), and near-infrared (NIR). The motorized objective turret and aperture stop are interlocked, enabling optimal illumination and contrast of each objective lens. The wafer handler can also be adapted to other microscope models on a special-order basis.

Ergonomic Stage Options for Operator Comfort and Work Efficiency

• Quick release manual vacuum stage optimizes operator comfort and efficiency. X-Y control and wafer rotation are standard.
• Further automating the inspection process, the motorized stage* can be controlled via a joystick or via pre-programmed routines. One push button drives the stage to and from the load/unload position and home position.

* Motorized stage may not be available in some areas.

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