High-Quality Optical Lenses and Components Made for Inspection

The system’s integrated objective lenses are manufactured to the strictest quality standards. Performance variation is minimized owing to features such as wavefront aberration control. The high numerical aperture and long working distance of MXPLFLN objectives combine to enable precision inspection from further away, reducing the risk of the objective hitting your sample.

Quickly switch between the most frequently used observation methods, including brightfield, differential interference contrast (DIC), polarization, infrared, fluorescence, and darkfield for different types of analysis. Our MIX slider enhances traditional darkfield with selectable quadrant LED illumination, enabling you to control the direction of light shining on the sample (directional darkfield). With MIX observation, directional darkfield can be used with brightfield, simple polarized light, or fluorescence observation to show more in your sample.

Easy-To-Use Software with Powerful Features

Edge Intensity Measurement Precisely Detects Defect Edges

The software’s edge intensity scanner precisely and automatically detects the edges of defects and sample structures with straight lines, curves, circles, and points.

Perform Simultaneous Measurements in One Sitting

Multi-position acquisitions of repeated structures within the sample or between different samples positioned on the stage can be programmed and automated with the edge detection tool.

Macro Programming for Automatic Dimensional Measurements

Use the program functions to seamlessly integrate multi-position acquisition, autofocusing, and automatic measurements into the edge detection workflow with a single click.

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