The AL120-12 wafer handler is compatible with both FOUP (Load Port) and FOSB, ideal for lower cost back-end inspection. The safe and ergonomic design maintains operator safety while effectively transferring wafers including thin and warped wafers.
300mm Wafer Loader AL120-12 Specifications | ||
AL120-LMB12-LP3 | AL120-LMB12-F | |
Wafer Size | 300 mm in dia. (SEMI M1.15, t=775 µm) Option: 200 mm in dia. | |
Cassette |
- FOUP (Front Opening Unified Pods)
- SEMI: E47.1-0200 Standard Product - FIMS-FOSB, FOSB |
- FOSB (Front Opening Shipping Box)
- SEMI: M31-0999 Standard Product |
Number of Cassettes | One Cassette (for Loading and Unloading) | |
Cassette Placement Height | 900 mm | |
Loading Port | Included | Not Included |
Transfer Sequence | Top Macro Inspection, Back Macro Inspection, Micro Inspection | |
Inspection Mode | All Wafers Inspection, Sampling Inspection | |
Wafer Alignment | Non-contact Centering | |
Wafer Transfer System | Vacuum-contact Mechanical Arm System | |
Applicable Microscope | Olympus Semiconductor Inspection Microscope MX61L | |
Utility |
AC100V – 120V, 220 – 240V 3.0/1.7A 50/60Hz
Vacuum -67kPa – -80kPa Clean dry air 0.5MPa – 0.6MPa |
AC100V – 120V, 220 – 240V 3.0/1.7A 50/60Hz
Vacuum -67kPa – -80kPa |
Stage | XY Manual Contact Stage: XY Coarse/Fine Motion, Included with a 360° Rotating Mechanism | |
Mass (Excluding the Microscope) | 360 kg approx. | 270 kg approx. |
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