We used novel manufacturing technology to create objective lenses with simultaneously improved numerical aperture, working distance, and image flatness. Their high numerical aperture (NA) and 3 mm working distance improves field of view and image quality from the center to the edge, enabling greater throughput in automated semiconductor inspection. 20X and 50X brightfield lenses are available.
MXPLFLN50X
The MXPLFLN50X is our first 50X objective with a 0.8 numerical aperture and 3 mm working distance. Compared to a LMPLFLN100X objective, the field of view is four times greater thanks to the 0.8 NA at 50X magnification.
MXPLFLN20X
The MXPLFLN20X is our first 20X objective with a 0.6 numerical aperture and 3 mm working distance. Its high NA and high image flatness produces homogenous images that are ideal for stitching.
Magnification [X] | 20 |
---|---|
Numerical aperture (NA) | 0.6 |
Working distance (WD) [mm] | 3 |
Objective field number | 26.5 |
Immersion medium | Air/dry |
Spring loaded | N/A |
Correction collar | N/A |
Correction range of correction collar | N/A |
Iris | N/A |
Correction level of chromatic aberration | Semi-apochromat (FL) |
Parfocalizing distance [mm] | 45 |
Back focal plane (BFP) position | -8.0 |
Type of screw thread | W20.32 × 0.706 (RMS) |
Brightfield (Reflected) | Good |
Brightfield (Transmitted) | Good |
Darkfield (Reflected) | N/A |
Darkfield (Transmitted) | N/A |
DIC (Reflected) | Good |
DIC (Transmitted) | N/A |
Phase contrast | N/A |
Relief contrast | N/A |
Polarized light | Limitation |
Fluorescence (B, G excitation) | Good |
UV fluorescence (at 365 nm) | N/A |
Multiphoton | N/A |
TIRF | N/A |
IR | N/A |
WLI | N/A |
Auto focus | Good |
Magnification [X] | 50 |
---|---|
Numerical aperture (NA) | 0.8 |
Working distance (WD) [mm] | 3 |
Objective field number | 26.5 |
Immersion medium | Air/dry |
Spring loaded | N/A |
Correction collar | N/A |
Correction range of correction collar | N/A |
Iris | N/A |
Correction level of chromatic aberration | Semi-apochromat (FL) |
Parfocalizing distance [mm] | 45 |
Back focal plane (BFP) position | -8.0 |
Type of screw thread | W20.32 × 0.706 (RMS) |
Brightfield (Reflected) | Good |
Brightfield (Transmitted) | Good |
Darkfield (Reflected) | N/A |
Darkfield (Transmitted) | N/A |
DIC (Reflected) | Good |
DIC (Transmitted) | N/A |
Phase contrast | N/A |
Relief contrast | N/A |
Polarized light | Limitation |
Fluorescence (B, G excitation) | Good |
UV fluorescence (at 365 nm) | Good |
Multiphoton | N/A |
TIRF | N/A |
IR | N/A |
WLI | N/A |
Auto focus | Good |
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