Applications

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IC Pattern on a Semiconductor Wafer Darkfield is used for detecting minute scratches or flaws on a sample or inspecting samples with mirrored surfaces, such as wafers. MIX illumination enables users to view both patterns and colors.	_{MIX (Brightfield + Darkfield)}	_Darkfield

IC Pattern on a Semiconductor Wafer

Darkfield is used for detecting minute scratches or flaws on a sample or inspecting samples with mirrored surfaces, such as wafers.

MIX illumination enables users to view both patterns and colors.

MIX (Brightfield + Darkfield)

_{MIX (Brightfield + Darkfield)}

Darkfield

_Darkfield

_Fluorescence	_{MIX (Fluorescence + Darkfield)}	Photoresist Residue on a Semiconductor Wafer Fluorescence is used for samples that emit light when illuminated with a specially designed filter cube. This is used to detect contamination and photoresist residue. MIX illumination enables the observation of both the photoresist residue and IC pattern.

Fluorescence

_Fluorescence

MIX (Fluorescence + Darkfield)

_{MIX (Fluorescence + Darkfield)}

Photoresist Residue on a Semiconductor Wafer

Fluorescence is used for samples that emit light when illuminated with a specially designed filter cube. This is used to detect contamination and photoresist residue.

MIX illumination enables the observation of both the photoresist residue and IC pattern.

LCD Color Filter This observation technique is suitable for transparent samples such as LCDs, plastics, and glass materials. MIX illumination enables the observation of both the filter color and circuit pattern.	_{Transmitted Light}	_{MIX (Transmitted Light + Brightfield)}

LCD Color Filter

This observation technique is suitable for transparent samples such as LCDs, plastics, and glass materials.

MIX illumination enables the observation of both the filter color and circuit pattern.

Transmitted Light

_{Transmitted Light}

MIX (Transmitted Light + Brightfield)

_{MIX (Transmitted Light + Brightfield)}

_Brightfield	_{Differential Interference Contrast (DIC)}	Spheroidal Graphite Cast Iron DIC is an observation technique where the height of a sample is visible as a relief, similar to a 3D image with improved contrast; it is ideal for inspections of samples that have very minute height differences, including metallurgical structures and minerals.

Brightfield

_Brightfield

Differential Interference Contrast (DIC)

_{Differential Interference Contrast (DIC)}

Spheroidal Graphite Cast Iron

DIC is an observation technique where the height of a sample is visible as a relief, similar to a 3D image with improved contrast; it is ideal for inspections of samples that have very minute height differences, including metallurgical structures and minerals.

Sericite Differential interference contrast (DIC) is an observation technique where the height of a sample, normally not detectable in brightfield, is visible as a relief, similar to a 3D image with improved contrast. It is ideal for inspections of samples that have very minute height differences, including metallurgical structures and minerals.	_Brightfield	_{Polarized Light}

Sericite

Differential interference contrast (DIC) is an observation technique where the height of a sample, normally not detectable in brightfield, is visible as a relief, similar to a 3D image with improved contrast. It is ideal for inspections of samples that have very minute height differences, including metallurgical structures and minerals.

Brightfield

_Brightfield

Polarized Light

_{Polarized Light}

_{Infrared (IR)}		Bonding Pads on a IC Pattern IR is used to look for defects inside IC chips and other devices made with silicon on glass.

Infrared (IR)

_{Infrared (IR)}

Bonding Pads on a IC Pattern

IR is used to look for defects inside IC chips and other devices made with silicon on glass.

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