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Microscope Solutions for
Semiconductor Manufacturing

Photolithography

Photolithography is the process of imprinting integrated circuit patterns on the wafer. This process is repeated several times to make complex circuit patterns.

Measuring the Resist Thickness in the Photoresist Process

The inspector prints the designed pattern on the silicon wafer using photolithography. Managing the thickness of the resist is critical to correctly print the pattern on the wafer.

Our Solution

With QWP filters, our OLS5000 laser confocal microscope can remove the scattered light effect from the silicon and accurately capture the surface profile. Skip scan mode also helps with fast acquisition.

OLS series laser scanning microscope

OLS series laser scanning microscope

Photoresist MPLAPON100xLEXT

Photoresist captured using a MPLAPON100xLEXT objective

Scattered light

Scattered light

Remove affect of Scattered light

Remove the affect of scattered light

Application Notes

Explore related applications:

Step measurement of transparent film applied to a glass surface
Step Measurement of Transparent Film Applied to a Glass Surface Read More
Evaluating the Coating on a Smartphone Housing
Evaluating the Coating on a Smartphone Housing / Film Thickness Measurement and 3D Surface Profile Measurement using a Laser Microscope Read More

Checking for Residual Photoresist

Photoresist must be completely removed from the wafers at the end of the lithography process as its residues cause the electric circuits to malfunction. Residual photoresists are difficult to inspect due to their small size.

Our Solution

The fluorescence observation method on our MX series industrial microscope brightens the residues for easy inspection. Combine the microscope with the optional auto wafer loader for highly efficient inspections.

MX series semiconductor microscope

MX series semiconductor microscope
(fluorescence combination)

Fluorescent observation of residues of photoresist

Fluorescent observation of residues of photoresist

Application Notes

Explore related applications:

Circuit Pattern Inspection on Wafer Samples
Circuit Pattern Inspection on Wafer Samples Read More
Evaluating the Coating on a Smartphone Housing
Detecting Manufacturing Defects on Semiconductor Wafers Using a Digital Microscope Read More

Checking IC Patterns on a Wafer after Etching

A silicon carbide (SiC) wafer is used as a substrate for a power semiconductor. An inspector checks the pattern dimension on the wafer after etching. As pattern sizes become smaller, accuracy is needed to check them. The pattern (trench) on the SiC wafer must also be measured. The size of the trench on the SiC is around 1 μm.

Our Solution

Our OLS series microscope can measure the fine patterns after etching.

OLS series laser scanning microscope

OLS series laser scanning microscope

Pattern on SiC wafer

Pattern on SiC wafer

Cross section of SiC wafer

Cross section of a SiC wafer

Application Notes

Explore related applications:

Circuit Pattern Inspection on Wafer Samples
Circuit Pattern Inspection on Wafer Samples Read More
Evaluating the Coating on a Smartphone Housing
Detecting Manufacturing Defects on Semiconductor Wafers Using a Digital Microscope Read More
Measuring the Thickness of Photoresist Film
Measuring the Thickness of Photoresist Film Read More

Detecting Defects on Patterns

Wafers can get defects from degrading manufacturing equipment, inadequate adjustment, human error, and contamination, so it is critical to detect them.

Our Solution

Our MX series and DSX series microscopes can be used to inspect defects. The operator selects a suitable observation method to detect defects with low magnification and confirms the type of defect using high magnification. Our DSX series (with a customized large stage) provides a simple workflow with easy-to-change observation methods.

MX series semiconductor microscope

MX series semiconductor microscope

DSX series digital microscope

DSX series digital microscope

DIC observation with high magnification

DIC observation with high magnification

Application Notes

Explore related applications:

Circuit Pattern Inspection on Wafer Samples
Circuit Pattern Inspection on Wafer Samples Read More
Measuring the Volume of Integrated Circuit Chipping After the Dicing Process Using a Digital Microscope
Measuring the Volume of Integrated Circuit Chipping After the Dicing Process Using a Digital Microscope Read More

MX series semiconductor microscope

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DSX series digital microscope

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