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显微镜解决方案
半导体显微镜

Capability Beyond the Conventional

Unlock the full potential of an automated semiconductor inspection with custom microscope hardware and software. 

Capability Beyond the Conventional

The MX63 and MX63L semiconductor microscope systems offer quality observations for up to 300 mm wafers, flat panel displays, printed circuit boards, and other large samples. These ergonomic and user-friendly systems feature a modular design for diverse applications.

To streamline your inspection, the MX63 series can be customized with:

  • Large, motorized stage to inspect large wafers
  • An array of wafer holders and sample fixtures
  • Tailor-made software based on simple-to-use PRECiV™ software
  • Adapters to enable transmitted IR inspection

Customize Your Semiconductor Microscope

Full Motorization

Full Motorization

Discover our motorized X-Y stages and Z-axis for automated semiconductor inspection.

Enhanced Imaging

Enhanced Imaging

Use transmitted IR light for inspection through silicon samples, such as chip damage inspection and short circuit detection. 

Custom Sample Holders

Custom Sample Holders

Choose from a range of sample holders that can be customized for specific applications.

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Customized Software to Optimize Your Inspection Workflows

Maximize all the advantages of a motorized stage with customized software solutions. Our PRECiV™ software can be customized for your specific workflow.

For example, the Navigate on Wafer customized solution offers a multiposition measurement workflow. 

Watch the video to learn how this solution defines the wafer layout and navigates to various points on the wafer for imaging.

Contact Us to Discuss Your Requirements

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