The 405 nm violet laser and dedicated high-NA objectives make it possible to capture fine patterns and defects that conventional optical microscopes, white-light interferometers, or red laser-based microscopes are unable to detect.

Red type (658 nm: 0.26 μm line & space)

Violet type (405 nm: 0.12 μm line & space)

Dedicated LEXT objectives can accurately measure peripheral areas that would otherwise get distorted.

Conventional objectives

LEXT objectives

New MEMS scanner performs accurate X-Y scanning with low scan trace distortion and minimal optical aberrations.

The 4K scan technology scans 4,096 pixels — four times more than our previous model — in the X-axis direction.
The OLS5000 microscope can detect slopes that are almost vertical as well as very low steps without image correction. 

Because conventional laser microscopes use standard image processing techniques such as smoothing to eliminate noise, they sometimes lose accurately measured fine height irregularities along with the noise.
The OLS5000 microscope employs Olympus’ Smart Judge algorithm to automatically detect only reliable data, facilitating accurate measurements without losing fine height irregularity data. 

• PEAK algorithm
• Dual confocal system
• Sq noise (measuring noise) guarantee
• Accuracy and repeatability are guaranteed
• Hybrid matching algorithm
• Hybrid dampening mechanism
• HDR scan

The microscope's scanning algorithm delivers improved data quality and greater speed to reduce the scan time and streamline your workflow, resulting in better productivity.

VLSI Standard 80 nm height sample (MPLFLN10XLEXT) 

The OLS5000 microscope incorporates a PEAK algorithm for 3D data construction. This algorithm provides highly accurate data from low to high magnifications and reduces the data acquisition time.

When measuring the shape of steps on a sample containing near-vertical planes, such as an electronic component or MEMS, the data acquisition time can be reduced by limiting the Z-direction scanning range.
A 700 μm step can be measured in about 15 seconds without degrading the accuracy (when the MPLAPON20x objective is used). 

• Band scan
• 1-line data acquisition

The system features automatic data capture, so difficult setting adjustments are no longer necessary. Even users with minimal training can still obtain accurate results.

The simple analysis function measures the step, line width, surface roughness, area, and volume only in the specified measurement areas. The causes of variance in the measurement results, such as the edge position and the threshold of the reference planes in volume analysis, are automatically detected so that the measurement results are stable and not affected by the operator’s skill level.

Measurement of the step height difference and distance between two specified regions.

Measurement of the difference in angle between two specified regions.

Measurement of the area/volume in the specified region; the reference planes are detected automatically, so no threshold setting is necessary.

Measurement of the surface roughness in the specified region.

Measurement of the width by automatically detecting edges in the specified region.

Measurement of R and the height from the reference plane based on the automatic recognition of a circular shape in the specified region.

Smart Judge processing automatically eliminates measurement noise without compromising data accuracy, while Smart Leveling detects the main horizontal plane (reference plane) at the zero height position. Activate both with a single click.

Conduct the inspection and take measurements.

Output the report and save the template.

During the next acquisition, open the saved template.

Instantly output a report based on the template.

• Real-time macro mapping
• Continuous auto focus
• Smart scan II
• Macro function

The extension frame for the OLS5000 microscope accommodates samples with a height of up to 210 mm, while the ultra-long working distance objective facilitates measurement of concavities as deep as 25 mm.
In both cases, all you have to do is place the sample on the stage.

Connecting rod

Tool

Piston head

General-purpose lens (50x)

LEXT-dedicated lens (50x)

Our line of dedicated LEXT objectives include a 10x objective and long working distance objectives, enhancing the microscope's measurement performance. 

Inner texture / Area roughness measurement (MPLAPON20XLEXT / 3 x 3 stitched)

Fuel injector nozzle (replica) / Area roughness measurement (LMPLFLN50XLEXT)

Piston ring / Area roughness measurement (MPLAPON50XLEXT)

Bearing ball / Profile measurement (MPLAPO50XLEXT)

Corrosion on stainless steel / Height measurement (MPLAPON20XLEXT / 3 x 3 stitched)

Copper plate / Area roughness measurement (MPLAPON50XLEXT)

Diffusion plate / Profile measurement (MPLAPON50XLEXT / 3 x 3 stitched)

Sponge / Profile measurement (MPLAPON20XLEXT / 3 x 3 stitched)

Ni bump / Height measurement (MPLAPON20XLEXT)

MEMS ultrasonic transducer (MPLAPON50XLEXT) 

Photoresist / Height measurement (MPLAPON100XLEXT) 

Bonding wire (MPLAPON100XLEXT) 

Micro needle / Profile measurement (MPLAPON50XLEXT / 6 x 6 stitched) 

Skin (replica) / Area roughness measurement (MPLAPON20XLEXT / 5 x 5 stitched)
Courtesy of Functional Design Laboratory, Faculty of Fashion Science, Bunka Gakuen University 

Grind stone / Profile measurement (MPLAPON20XLEXT) 

Acceptance seat of ballpoint pen / Area roughness measurement (LMPLFLN20XLEXT) 

OLS5000-SAF

• 100 mm motorized stage
• Max. height of sample: 100 mm

OLS5000-EAF

• 100 mm motorized stage
• Max. height of sample: 210 mm

OLS5000-SMF

• 100 mm motorized stage
• Max. height of sample: 40 mm

OLS5000-EMF

• 100 mm motorized stage
• Max. height of sample: 150 mm

OLS5000-LAF

• 300 mm motorized stage
• Max. height of sample: 37 mm